Enhancement of yield of functional microelectronic devices

ABSTRACT

Described herein are techniques related to a semiconductor fabrication process that facilitates the enhancement of systemic conformities of patterns of the fabricated semiconductor wafer. A semiconductor wafer with maximized systemic conformities of patterns will maximize the electrical properties and/or functionality of the electronic devices formed as part of the fabricated semiconductor wafer. This Abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

RELATED APPLICATIONS

The present application claims the benefit of U.S. Provisional PatentApplication No. 62/581,535, filed on Nov. 3, 2017, entitled “Enhancementof Yield of Functional Microelectronic Devices,” which is incorporatedherein by reference in its entirety. Also, the present applicationclaims the benefit of U.S. Provisional Patent Application No.62/753,153, filed on Oct. 31, 2018, entitled “Active Process Modeling,”which is incorporated herein by reference in its entirety. Furthermore,the present application claims the benefit of U.S. Provisional PatentApplication No. 62/753,155, filed on Oct. 31, 2018, entitled “TransferFunction and Process Modeling for The Fabrication Of MicroelectronicDevices,” which is incorporated herein by reference in its entirety.

BACKGROUND

A microelectronic device is an individual electronic device andcomponent or a collection thereof at a micrometer or smaller scale. Anindividual microelectronic device may include transistors, capacitors,inductors, resistors, diodes, insulators, conductors, and the like.Other devices may include circuitry and some combination of individualdevices. An integrated circuit (IC) is such an example of such a device,which is sometimes called a microchip or the like.

Because of their small size, sophisticated techniques are used in themanufacture of microelectronic devices. One such technique involves thefabrication of semiconductor wafers. Typically, the microelectronicdevices are produced as part of a stack of patterned layers of materialsto form a semiconductor wafer.

As the size of microelectronic devices decreases and their complexityincreases, it becomes increasingly more difficult to maximize the yieldof electrical-mechanically functional microelectronic devices producedby semiconductor fabrication. The existing approaches to address theseissues are becoming less effective.

SUMMARY

In cooperation with a semiconductor fabrication process, thetechnologies described herein facilitate the enhancement of systemicconformities of patterns of a semiconductor wafer. A semiconductor waferwith few or no systemic non-conformities will maximize theelectrical-mechanical properties and/or functionality of the electronicdevices formed as part of the fabricated semiconductor wafer.

In cooperation with the fabrication process, the technologies describedherein use fabrication metrology data of the semiconductor wafers todetermine a systemic impact on non-conformities in non-conformingregions on the electrical-mechanical functionality of themicroelectronic devices being formed therein. With this determination,an amelioration may be performed on the non-conformities that aredetermined to have a sufficient systemic impact on theelectrical-mechanical functionality of the microelectronic device beingformed as part of the semiconductor wafer. That amelioration may beperformed by one semiconductor fabrication tool or a combination ofmultiple tools.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram illustrating an example of a typicalsemiconductor fabrication process.

FIG. 2 is a block diagram illustrating an example system in accordancewith the present disclosure.

FIG. 3 is a flowchart illustrating an example method in accordance withthe present disclosure.

FIGS. 4A and 4B illustrate visualizations of a surface of a wafer withregions of non-conformities. The visualizations represent those producedin accordance with the present disclosure.

The Detailed Description references the accompanying figures. In thefigures, the left-most digit(s) of a reference number identifies thefigure in which the reference number first appears. The same numbers areused throughout the drawings to reference like features and components.

DETAILED DESCRIPTION

In cooperation with a semiconductor fabrication process, thetechnologies described herein facilitate the enhancement of systemicconformities of patterns of a semiconductor wafer. A semiconductor waferwith limited systemic non-conformities will maximize theelectrical-mechanical properties and/or functionality of the electronicdevices formed as part of the fabricated semiconductor wafer.

The fabrication of semiconductor wafers may be described as a formationof a collection of microelectronic devices from an accumulation oflayers of pattern semiconductor material of a semiconductor wafer. Thelayers may also be described as a stack of patterns of materials. Theformed microelectronic devices are designed to be electrically andmechanically functional when operated in their intended manner.

In cooperation with the fabrication process, the technologies describedherein operate to detect and ameliorate systemic non-conformities of thefabricated wafer. As described herein, an example of that includesgathering fabrication metrology data of the semiconductor wafers. Thatis, the fabrication metrology data includes measurements from or aboutthe wafer as it is being fabricated. Based on that gathered fabricationmetrology data, non-conformities of the semiconductor wafer aredetected. A visualization of a layer (or multiple layers) of thegathered fabrication metrology data of the semiconductor wafer isgenerated and displayed. At least one non-conforming region isidentified. The non-conforming region is an aggregation of neighboringnon-conformities.

Then, with the technologies described herein, a determination is made ofa systemic impact on the non-conformities in the non-conforming regionson the electrical-mechanical functionality of the microelectronicdevices being formed. With this determination, an amelioration isperformed on the non-conformities in the non-conforming regions that aredetermined to have a sufficient systemic impact on theelectrical-mechanical functionality of the microelectronic device beingformed as part of the semiconductor wafer. That amelioration may beperformed by one semiconductor fabrication tool or a combination ofmultiple tools.

Example Semiconductor Fabrication

FIG. 1 shows an example of a typical semiconductor fabrication 100.Before the fabrication itself, the overall design 95 of thesemiconductor wafer and the microelectronic devices formed therein areproduced. A layout is produced from the design. The layout includes setsof patterns that will be transferred to the stacked layers of materialthat forms the semiconductor wafer during its fabrication. Since thedesign 95 affects and informs various portions of the fabrication, it isdepicted with a broad arrow generally pointing to the fabrication ratherthan to particular parts thereof.

The example fabrication 100 includes deposition 110, photolithography130, etch 150, cleaner 160, and fabrication metrology data 170. Thephotolithography 130 is bracketed by tracks 120 and 140.

As depicted, the example fabrication 100 represents the fabrication of asingle layer of a semiconductor wafer. Arrow 170 indicates that thewafer fabrication involves the multiple stacking layers of patterns.While the fabrication of a single layer is described in a particularorder herein, it not uncommon for some portions to be skipped and othersrepeated during the fabrication of a single layer.

The deposition 110 employs a deposition tool that grows, coats, orotherwise transfers a material onto the wafer. A deposition tool mayemploy one or more technologies to accomplish this task. Examples ofdeposition technologies include physical vapor deposition (PVD),chemical vapor deposition (CVD), electrochemical deposition (ECD),molecular beam epitaxy (MBE) atomic layer deposition (ALD), and others.

The photolithography 130 employs a photolithographic tool that is usedto transfer a pattern from a photomask to the surface of the wafer(i.e., substrate). The pattern information is recorded on a layer ofphotoresist which is applied on the substrate. The photoresist changesits physical properties when exposed to light (often ultraviolet) oranother source of illumination (e.g., X-ray). The photoresist is eitherdeveloped by (wet or dry) etching or by conversion to volatile compoundsthrough the exposure itself. The pattern defined by the mask is eitherremoved or remained after development, depending if the type of resistis positive or negative. For example, the developed photoresist can actas an etching mask for the underlying layers.

Typically, the track 120 has a track tool that prepares thewafer/substrate for the photolithography. This may involve cleaning ofthe wafer/substrate or add a coating or film thereon. Similarly, thetrack 140 has a tool that handles the wafer/substrate after thephotolithography 130. Often, this involves post-lithographic cleaning orpreparation for the next step in the fabrication.

The etch 150 includes an etching tool that is used to remove and/or addmaterial selectively on the surface of the wafer (i.e., substrate) inorder to create patterns thereon. Typically, the material is selectivelyremoved either by wet (i.e., chemical) or dry (i.e., physical) etching.An example of dry etching is plasma etching.

Plasma etching involves a high-speed stream of glow discharge (plasma)of an appropriate gas mixture being shot at a sample. The plasma source,known as etch species, can be either charged (ions) or neutral (atomsand radicals). During the process, the plasma generates volatile etchproducts at room temperature from the chemical reactions between theelements of the material etched and the reactive species generated bythe plasma. Eventually, the atoms of the shot element embed themselvesat or just below the surface of the target, thus modifying the physicalproperties of the target

The cleaner 160 includes a cleaning tool that is used to clean thewafer/substrate (e.g., remove photoresist) and/or prepare thewafer/substrate for the application of the next layer. Typically, thecleaning tool removes particles and impurities on the wafer.

The fabrication metrology data 170 includes at least one fabricationmetrology data tool (e.g., sensor) that is designed to measure someaspect of the wafer fabrication process itself, the operation of afabrication tool, or something measurable about the wafer, thesubstrate, the patterns imparted thereon, and the like. While this isshown in FIG. 1, this tool may be employed anywhere in the process andat multiple stages with each tool.

Example System for Enhancement of Yield of Functional MicroelectronicDevices

FIG. 2 illustrates an example system 200 that enhances the yield offunctional microelectronic devices produced from semiconductorfabrication in accordance with the technologies described herein. Stateddifferently, this figure illustrates the example system 200 thatfacilitates the detection and amelioration of systemic non-conformitiesduring semiconductor fabrication in accordance with the technologiesdescribed herein. The example system 200 includes the semiconductorfabrication 100 described above and shown in FIG. 1.

As depicted, the example system 200 includes the tools of thesemiconductor fabrication 100, systemic conformity enhancement tool 210,and a multi-tool advanced process control (APC) tool 220. Thesemiconductor fabrication 100 includes tools to perform the deposition110, the photolithography 130, the etch 150, the cleaner 160, andfabrication metrology data 170. The tool for photolithography 130 isbracketed by tools for track 120 and 140.

The technologies described herein may be incorporated into only onepart/portions of the example system 200 or multiple parts/portions ofthe example system 200. That is, the technologies described here may,for example, be incorporated into only one tool (e.g., the etch 150).Alternatively, for example, the technologies described herein may beimplemented by multiple tools and systems. For example, they may beimplemented by the deposition 110, cleaner 160, and the systemicconformity enhancement tool 210. Moreover, the example system 200 mayemploy the technologies described herein to perform a method 300described below.

The systemic conformity enhancement tool 210 is a system that isspecifically designed to coordinate data collection and analysis withthe fabrication 100 or some portion of the fabrication. Indeed, in someimplementations, the systemic conformity enhancement tool 210 performsthe bulk of the example process 300 described below. The tool 210 itselfmay be constructed from one or more computing devices operating aspecially designed set of computer programs.

The multi-tool APC tool 220 is a particularly designed APC for directingthe actions of multiple tools so as to ameliorate (e.g., correct) thenon-conformities. In other implementations, the APC tool 220 may controlonly one tool. An APC tool 220 is typically implemented by one or morecomputing systems with specially designed programs running thereon.

An APC is a component to improve performance, yield, throughput, andflexibility of the manufacturing process using run-to-run,wafer-to-wafer, within the wafer and real-time process control.Typically, an APC system is multivariate, model-based APC system that isdeveloped in conjunction with feed-forward and feedback mechanisms toautomatically determine the optimal recipe for each wafer based on bothincoming wafer and tool state properties. The typical APC system useswafer fabrication metrology data, process models and sophisticatedcontrol algorithms to provide dynamic fine-tuning of intermediateprocess targets that enhance final device targets. The design of the APCsystem enables scalable control solutions across a single chamber, aprocess tool, multi-tools, a process module and multi-process modulesusing similar building blocks, concepts, and algorithm.

Exemplary Process

FIG. 3 is a flow diagram illustrating an example process 300 thatimplements the techniques described herein. The example process 300 isperformed, at least in part, by the example system 200 and itfacilitates the enhancement of systemic conformities of patterns duringsemiconductor fabrication.

The example process 300 is performed in cooperation with a fabrication305 of semiconductor wafers. In some instances, the cooperation mayinclude the example process 300 being an integral part of thefabrication itself.

In cooperation with the fabrication, the example system 200 forms acollection of microelectronic devices from a stack of patterns ofmaterials (i.e., layers) of a semiconductor wafer. The formedmicroelectronic devices are designed to be electrically and/ormechanically functional when operated in their intended manner.

At block 310, the example system 200 gathers fabrication metrology dataof the semiconductor wafers. This fabrication data is produced frommeasurements taken of, about, on, in, and for the wafer that is in theprocess of fabrication or has just completed its fabrication. That is,the fabrication metrology data is a measurement of a characteristic ofthe wafer formed in the semiconductor fabrication.

The fabrication metrology data includes measurements of one or morecharacteristics of one or more wafers formed in the semiconductorfabrication and each measurement being associated with a spatiallocation of the wafer from where such measurement is made.

For example, the fabrication metrology data may be derived frommeasurements about an active layer, patterns in that active layer,devices completed by the active layer, an inchoate device exposed by theactive layer, and the like. Herein, the active layer is the layer thatis the focus of the fabrication at that moment. Often, the active layeris the top or uppermost layer. For example, the active layer is the onethat is or was just deposited, cleaned, or etched.

In some instances, for example, the fabrication metrology data may bederived from measurements about layer immediately adjacent the activelayer, patterns in that adjacent layer, devices completed by theadjacent layer, an inchoate device exposed by the adjacent layer, andthe like. Often, that immediate adjacent layer is the layer just belowthe active or uppermost layer.

In still other instances, for example, the fabrication metrology datamay be derived from measurements about multiple adjacent layers of thewafer or of the wafer itself. For example, the multiple adjacent layersof the wafer may include electrically and/or mechanically interactingmicroelectronic devices therein.

Typically, the fabrication metrology data includes measurements from(calculations based on measurements from) multiple semiconductor wafersusing a common stack of patterns of materials during the semiconductorfabrication. Examples of the fabrication metrology data includemeasuring and/or calculating data such as measuring and/or calculatingfabrication metrology data selected from a group consisting of edgeplacement error (EPE); grid critical dimension (CD) measurements; blockline width roughness (LWR) measurements; grid LWR measurements; block CDmeasurements; profile; cross-section; selective deposition; electricalproperties of the formed microelectronic devices; contact hole CD;contact hole roughness; CER and ellipticity; short trenches tip-to-tipdistance; line tip-to-tip distance; layer-to-layer displacement data;overlay data; film thicknesses and uniformities; measurements that occurafter actions of a single tool; measurements that occur after all of thetools of a single layer; measurements that occur after multiple layers;and a combination thereof.

As used herein, the edge placement error (EPE) is, for example, ameasure of the amount of error between an actual device feature edgeposition and the intended (target) feature edge position. The gridcritical dimension (CD) measurements is, for example, the distancemeasured from one feature edge to another feature edge as determined byscanning electron microscope (SEM) image or other metrology techniques,such as AFM (atomic force microscope), scatterometry/diffraction-basedmetrology, or the like. The block line width roughness (LWR)measurements is, for example, a measure of the amount of deviation alongthe edge of a feature relative to an average edge position. In thiscontext, a “block” feature is a grouping of neighboring features.

At block 312, the example system 200 detects non-conformities of thesemiconductor wafer based on the gathered fabrication metrology data. Anon-conformity is an area of an active layer with characteristics thatare capable of being measured and where such measurements fall outside adefined range and/or threshold.

What can be measured depends on a given process flow (i.e.,manufacturing process flow for a device layer(s)). As an example, onecan focus on a multi-patterning process flow such as Self-AlignedQuadruple Patterning (SAQP) and block patterning scheme. For thisscheme, there are several geometries at the wafer level that canmeasured with metrology tools. Examples of which include line patterns,trench patterns, overlay and other derived metrics from a combination ofthe above metrics. Typical dimension for lines and trenches is in orderof 10 to 30 nanometers and for overlay data about 1 nm-10's ofnanometers

At block 314, the example system 200 generates a visualization of thegathered fabrication metrology data of the semiconductor wafer. Thevisualization includes the production of an image of an active layerwith particular colors and/or shading that corresponds to particularlocations of the wafer are associated with measured and/or calculatedrange of fabrication metrology data and/or with the non-conformingregion.

In some implementations, the operations of block 314 may be described asgenerating a model of the semiconductor wafer based on the gatheredfabrication metrology data of the semiconductor wafer, and, based on thegenerated model, detecting non-conformities of the semiconductor waferbased on the gathered fabrication metrology data.

FIG. 4A shows a multicolored circular image 410, which is arepresentative visualization of the gathered fabrication metrology dataof an active layer of the wafer (e.g., the top layer). In the exampleimage 410, each spot in the circular image corresponds with a physicallocation of the active layer and the color and/or shading of that spotis indicative of the relative value of the gathered fabricationmetrology data associated with the corresponding physical location.

At block 316, the example system 200 determines whether there areregions of non-conformities of the active layer of the wafer. An area ofthe active layer is designated as a non-conforming region when it has anaggregation of neighboring non-conformities. The identification of thenon-conforming region includes partitioning a region of a layer of thewafer that includes an aggregation of neighboring non-conformities.

FIG. 4B shows a dual-colored circular image 420, which is arepresentative visualization of the gathered fabrication metrology dataof an active layer of the wafer (e.g., the top layer). Indeed, thecircular image 420 is derived from the multicolored circular image 410.Rather, the circular image 420 is derived from the same dataset fromwhich the multicolored circular image 410 is derived. However, only twocolors or shades are employed in this visualization.

Using at test based on a threshold or range and a measure ofadjacentness, areas of the active layer are identified as passing orfailing. Alternatively, the areas of passing are called conformingregions, and the areas of failing are called non-conforming regions. Incircular image 420, region 422 is a conforming region, but regions 424and 426 are non-conforming regions.

At block 318, the example system 200 determines the systemic impact onthe non-conformities in the non-conforming regions on the functionalityof the microelectronic devices being formed. With the example process300, this includes an estimate of the electrical-mechanical propertiesand/or functionality of an actual pattern of the active layer thatincludes the non-conforming region of the semiconductor wafer. In someapproaches, this determination includes a modeling of theelectrical-mechanical properties and/or functionality of themicroelectronic devices formed by at least the active layer with thenon-conforming region of the semiconductor wafer.

The determination of the systemic impact may include estimating theelectrical-mechanical properties and/or functionality of an actualpattern of one layer with the non-conforming region of the semiconductorwafer or of the microelectronic devices formed by at least one layerwith the non-conforming region of the semiconductor wafer.

At blocks 320 and 322, the example system 200 ameliorates thenon-conformities in the non-conforming regions that are determined tohave a sufficient systemic impact on the electrical-mechanicalfunctionality of the microelectronic device being formed as part of thesemiconductor wafer.

As used herein, the systemic impact involves a cumulative deleteriouseffect of non-conformities in the non-conforming regions on thefunctionality of the microelectronic devices being formed.

In some implementations, the sufficient systemic impact that may triggeramelioration is derived from a desired yield or a desired improvement inthe yield of the functionality of the microelectronic devices beingformed.

In some implementations, the sufficient systemic impact that may triggeramelioration is derived from a defined threshold of “defects,” which aremicroelectronic devices which fail quality standards. For example, thedefects include non-functioning or malfunctioning microelectronicdevices that are formed with the wafer. The defect threshold may be anabsolute number (e.g., 1000) or a percentage or ratio (e.g., 0.01% or 1part per million).

In some implementations, the sufficient systemic impact that may triggeramelioration may be based on just the defects in located within givennon-conforming regions, collections of such regions, a portion of thewafer (e.g., 30% of the wafer), or the entirety of the wafer.

In some implementations, the sufficient systemic impact that may triggeramelioration is based on the obtained fabrication metrology data (e.g.,particles, CD, overlay, thickness, and/or uniformity) that correlate todesired yield or result.

A result (other than yield) may trigger the action to change somethingabout the fabrication processes to achieve that goal. For example, theremay be goal of a particular uniformity or flatness of the wafer that canbe corrected for via one or more adjustments to the fabricationprocesses.

In some implementations, the sufficient systemic impact that may triggeramelioration is based identified spatial patterns of non-conformitiesand/or identified patterns related to particular fabrication tools.

In some implementations, the sufficient systemic impact that may triggeramelioration is based the non-co.

In some implementations, the EPE may be ameliorated by changes toparticular steps in the fabrication process. For example, an EPE can beameliorated by making a change in, for example, the lithographyexposure, etch, film deposition, bake temperatures during spin-coatprocess, ion implant process, cleans process (wet or dry), or otherprocess step during the device fabrication.

For example, the EPE may be adjusted or altered by making changes to thesteady temperature, temperature ramp of an electrostatic chuck (e.g.,entire chuck or zones), gas flow, or power during the etching process.

In some implementations, the EPE may be ameliorated by making changes tomultiple process steps. For example, an EPE can be ameliorated by makingchanges to the bake temperature during spin-coat process in addition tofocus ring temperature and voltage during the etch process step. Theremay be multiple changes to one process or multiple changes to multipleprocesses.

With block 320, that amelioration includes a selection of one or morechange in operation in the semiconductor fabrication performed by atleast one semiconductor fabrication tool. That is, some meaningful partof the fabrication process is changed with the goal of correcting thenon-conformities itself or perhaps the underlying cause of suchnon-conformities. These selected changes may be performed by onesemiconductor fabrication tool or a combination of multiple tools.

After that, the amelioration involves a simulation of a semiconductorwafer that would be fabricated in accordance with the selected changesin the operation. In this way, the example system 200 may be able todetermine whether the selected changes are useful for the immediate goalof reducing the non-conformities (without creating newnon-conformities).

After the simulation, the amelioration estimates the effect of theelectrical properties and/or functionality of the microelectronicdevices formed by the simulated semiconductor wafer. While theshort-term goal is to reduce non-conformities, the end goal is tomaximize functioning microelectronic devices in the fabricated wafer. Tothat end, the estimation determines if the simulated changes achievethat end goal. Thus, the amelioration may be repeated many times untilthe best operational changes are discovered.

The example system 200 may employ machine learning approaches as part ofthe amelioration. With this approach, the example system 200 learnswhich operational changes or combination of changes (or combination oftools) are most likely to produce effective results (of maximizingfunctional microelectronic devices) based on given conditions. The givenconditions include the particular type of non-conformities (orcombinations of types), the locations of non-conforming regions, size ofsuch regions, etc.

If the best operational changes involve just one tool, then the exampleprocess 300 proceeds to block 320 to perform single tool amelioration.If the best operational changes involve multiple tools, then the exampleprocess 300 proceeds to block 322 to perform multiple tool amelioration.

In some implementations, the amelioration may include a selection of apattern of a layer that includes some portion of a microelectronicdevice formed, at least in part, by the non-conforming region. Then,that selected pattern is altered. This alteration may be performedautonomously or semi-autonomously (that is, with some manualintervention). The goal of this approach is to eliminate thenon-conformities by employing a different design.

With this approach, a simulation of the fabrication of a semiconductorwafer is run with the altered pattern replacing the selected pattern.The effect on the electrical-mechanical properties and/or functionalityof the microelectronic devices formed by the simulated semiconductorwafer is estimated. That estimate helps determine if the altered patternchanges the non-conforming regions in a manner that is desirable.

A tool is one of the major components of the semiconductor fabricationprocess that act on the wafer itself. Examples of such tools are part ofthe example system 200 of FIG. 2. Those examples include a depositiontool, a track tool, a photolithography tool, an etch tool, and acleaning tool.

Additional and Alternative Implementation Notes

In the above description of exemplary implementations, for purposes ofexplanation, specific numbers, materials configurations, and otherdetails are set forth in order to better explain the present invention,as claimed. However, it will be apparent to one skilled in the art thatthe claimed invention may be practiced using different details than theexemplary ones described herein. In other instances, well-known featuresare omitted or simplified to clarify the description of the exemplaryimplementations.

The inventors intend the described exemplary implementations to beprimarily examples. The inventors do not intend these exemplaryimplementations to limit the scope of the appended claims. Rather, theinventors have contemplated that the claimed invention might also beembodied and implemented in other ways, in conjunction with otherpresent or future technologies.

The term “techniques,” for instance, may refer to one or more devices,apparatuses, systems, methods, articles of manufacture, and/orcomputer-readable instructions as indicated by the context describedherein.

As used in this application, the term “or” is intended to mean aninclusive “or” rather than an exclusive “or.” That is, unless specifiedotherwise or clear from context, “X employs A or B” is intended to meanany of the natural inclusive permutations. That is, if X employs A; Xemploys B; or X employs both A and B, then “X employs A or B” issatisfied under any of the foregoing instances. In addition, thearticles “a” and “an” as used in this application and the appendedclaims should generally be construed to mean “one or more,” unlessspecified otherwise or clear from context to be directed to a singularform.

These processes are illustrated as a collection of blocks in a logicalflow graph, which represents a sequence of operations that can beimplemented in mechanics alone, with hardware, and/or with hardware incombination with firmware or software. In the context ofsoftware/firmware, the blocks represent instructions stored on one ormore computer-readable storage media that, when executed by one or moreprocessors, perform the recited operations.

Note that the order in which the processes are described is not intendedto be construed as a limitation, and any number of the described processblocks can be combined in any order to implement the processes or analternate process. Additionally, individual blocks may be deleted fromthe processes without departing from the spirit and scope of the subjectmatter described herein.

The term “computer-readable media” is non-transitory computer-storagemedia or non-transitory computer-readable storage media. For example,computer-storage media or computer-readable storage media may include,but are not limited to, magnetic storage devices (e.g., hard disk,floppy disk, and magnetic strips), optical disks (e.g., compact disk(CD) and digital versatile disk (DVD)), smart cards, flash memorydevices (e.g., thumb drive, stick, key drive, and SD cards), andvolatile and non-volatile memory (e.g., random access memory (RAM),read-only memory (ROM)).

The following are examples of implementations of the technologydescribed herein:

Example 1

A method that facilitates yield of functional microelectronic devices incoordination with semiconductor fabrication, wherein semiconductorfabrication includes forming a collection of microelectronic devicesfrom layers (e.g., a stack of patterns of materials) of a semiconductorwafer, the method comprising:

-   -   gathering fabrication metrology data of the semiconductor wafer,        wherein the fabrication metrology data includes measurements of        one or more characteristics of the wafer formed in the        semiconductor fabrication and each measurement being associated        with a spatial location of the wafer from where such measurement        is made;    -   detecting non-conformities of the semiconductor wafer based on        the gathered fabrication metrology data;    -   identifying a non-conforming region of the semiconductor wafer,        wherein the non-conforming region includes an aggregation of        neighboring non-conformities;    -   determining the systemic impact on the non-conformities in the        non-conforming regions on the functionality of the        microelectronic devices formed at least in part by the        non-conforming region.

Example 2

A method of Example 1, wherein the gathering of fabrication metrologydata includes:

-   -   measurements from multiple semiconductor wafers using a common        stack of patterns of materials as the layers of the        semiconductors being fabricated;    -   measuring and/or calculating fabrication metrology data selected        from a group consisting of edge placement error (EPE), grid        critical dimension (CD) measurements, block line width roughness        (LWR) measurements, grid LWR measurements, block CD        measurements, profile (i.e., cross-section), selective        deposition; electrical properties of the formed microelectronic        devices; contact hole CD; contact hole roughness (CER and        ellipticity; short trenches tip-to-tip distance; line tip-to-tip        distance; layer-to-layer displacement data (i.e., overlay data);        film thicknesses and uniformities; measurements that occur after        actions of a single tool; measurements that occur after all of        the tools of a single layer; measurements that occur after        multiple layers; and a combination thereof.

Example 3

A method of Example 1, wherein a non-conformity is an area of an activelayer with characteristics that are capable of being measured and/orwhere such measurements fall outside a defined range and/or threshold.

Example 4

A method of Example 1 further comprising generating a visualization ofthe gathered fabrication metrology data of the semiconductor wafer.

Example 5

A method of Example 4, wherein the generating of the visualizationincludes producing an image of the wafer with particular colors and/orshading that corresponds to particular locations of the wafer areassociated with measured and/or calculated range of fabricationmetrology data.

Example 6

A method of Example 4, wherein the generating of the visualizationincludes producing an image of the wafer with particular colors and/orshading that corresponds to particular locations of the wafer areassociated with the non-conforming region.

Example 7

A method of Example 1, wherein functionality of the microelectronicdevices includes one of the following:

-   -   physical properties, arrangement/orientation relative to its        neighboring devices (e.g., within same layer, layers below, and        layers above), and physical functionality;    -   electrical properties, electrical interactions relative to its        neighboring devices (e.g., within same layer, layers below, and        layers above), and electrical functionality;    -   electrical-magnetic properties, electrical-magnetic interactions        relative to its neighboring devices (e.g., within same layer,        layers below, and layers above), and electrical-magnetic        functionality;    -   electrical-mechanical interactions relative to its neighboring        devices (e.g., within same layer, layers below, and layers        above), and electrical-mechanical functionality; or    -   a combination thereof.

Example 8

A method of Example 1, wherein the determination of the systemic impactincludes estimating the electrical-mechanical properties and/orfunctionality of an actual pattern of one layer with the non-conformingregion of the semiconductor wafer.

Example 9

A method of Example 1, wherein the determination of the systemic impactincludes modeling electrical-mechanical properties and/or functionalityof the microelectronic devices formed by at least one layer with thenon-conforming region of the semiconductor wafer.

Example 10

A method of Example 1 further comprising ameliorating thenon-conformities in the non-conforming regions changing the forming of acollection of microelectronic devices from layers of a semiconductorwafer.

Example 11

A method of Example 1 further comprising ameliorating thenon-conformities in the non-conforming regions that are determined tohave a sufficient systemic impact on the electrical-mechanicalfunctionality of the microelectronic device being formed as part of thesemiconductor wafer.

Example 12

A method of Example 11, wherein the amelioration includes:

-   -   choosing at least one semiconductor fabrication tool;    -   selecting at least one change in the operation of the chosen        semiconductor fabrication tool, where the at least one change        alters the semiconductor fabrication;    -   simulating a fabrication of a semiconductor wafer in accordance        with the selected change in the operation of the chosen        semiconductor fabrication tool;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 13

A method of Example 11, wherein the amelioration includes:

-   -   choosing a combination of multiple semiconductor fabrication        tools;    -   selecting at least one change in the operation of each of the        chosen semiconductor fabrication tools, wherein the changes        alter the semiconductor fabrication;    -   simulating a fabrication of a semiconductor wafer in accordance        with the selected change in the operation of each of the chosen        semiconductor fabrication tools;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 14

A method of Example 11, wherein the amelioration includes at least onechange in the operation of at least one semiconductor fabrication tool,wherein the at least one change alters the semiconductor fabrication.

Example 15

A method of Example 11, wherein the amelioration includes at least onechange in the operation of each of the chosen semiconductor fabricationtools, wherein the changes alter the semiconductor fabrication.

Example 16

A method of Example 11, wherein the amelioration includes at least onechange in the operation of each of the chosen semiconductor fabricationtools, wherein the changes alter the semiconductor fabrication.

Example 17

A method of Example 11, wherein the amelioration includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   altering the selected pattern.

Example 18

A method of Example 11, wherein the amelioration includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   obtaining an altered pattern, wherein the altered pattern is an        alteration of the selected pattern.

Example 19

A method of Example 11, wherein the amelioration includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   altering the selected pattern;    -   simulating a fabrication of a semiconductor wafer with the        altered pattern replacing the selected pattern;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 20

A method of Examples 1 through 19, wherein the tool or tools ofsemiconductor fabrication is selected from a group consisting of adeposition tool, a track tool, a photolithography tool, an etch tool,and a cleaning tool.

Example 21

A semiconductor fabrication tool configured to change its operation inresponse to a method of Examples 1 through 19.

Example 22

A non-transitory computer-readable storage medium comprisinginstructions that when executed cause a processor of a computing deviceto perform a method of Examples 1 through 19.

Example 23

A semiconductor wafer fabricated, at least in part, in cooperation witha method of Examples 1 through 19.

Example 24

A microelectronic device formed by semiconductor fabrication performed,at least in part, in cooperation with a method of Examples 1 through 19.

Example 25

A non-transitory computer-readable storage medium comprisinginstructions that when executed cause a processor of a computing deviceto perform operations in coordination with semiconductor fabrication byforming a collection of microelectronic devices from layers (e.g., astack of patterns of materials) of a semiconductor wafer, the operationscomprising:

-   -   gathering fabrication metrology data of the semiconductor wafer,        wherein the fabrication metrology data is a measurement of a        characteristic of the wafer formed in the semiconductor        fabrication;    -   detecting non-conformities of the semiconductor wafer based on        the gathered fabrication metrology data;    -   identifying a non-conforming region of the semiconductor wafer,        wherein the non-conforming region includes an aggregation of        neighboring non-conformities;    -   determining the systemic impact on the non-conformities in the        non-conforming regions on the functionality of the        microelectronic devices formed at least in part by the        non-conforming region.

Example 26

A non-transitory computer-readable storage medium of Example 25, whereinthe gathering operation includes:

-   -   measurements from multiple semiconductor wafers using a common        stack of patterns of materials as the layers of the        semiconductors being fabricated;    -   measuring and/or calculating fabrication metrology data selected        from a group consisting of measuring and/or calculating        fabrication metrology data selected from a group consisting of        edge placement error (EPE), grid critical dimension (CD)        measurements, block line width roughness (LWR) measurements,        grid LWR measurements, block CD measurements, profile (i.e.,        cross-section), selective deposition; electrical properties of        the formed microelectronic devices; contact hole CD; contact        hole roughness (CER and ellipticity; short trenches tip-to-tip        distance; line tip-to-tip distance; layer-to-layer displacement        data (i.e., overlay data); film thicknesses and uniformities;        measurements that occur after actions of a single tool;        measurements that occur after all of the tools of a single        layer; measurements that occur after multiple layers; and a        combination thereof.

Example 27

A non-transitory computer-readable storage medium of Example 25, whereina non-conformity is an area of an active layer with characteristics thatare capable of being measured and/or where such measurements falloutside a defined range and/or threshold.

Example 28

A non-transitory computer-readable storage medium of Example 25 furthercomprising generating a visualization of the gathered fabricationmetrology data of the semiconductor wafer.

Example 29

A non-transitory computer-readable storage medium of Example 28, whereinthe generating operation includes producing an image of the wafer withparticular colors and/or shading that corresponds to particularlocations of the wafer are associated with measured and/or calculatedthe range of fabrication metrology data.

Example 30

A non-transitory computer-readable storage medium of Example 28, whereinthe generating operation includes producing an image of the wafer withparticular colors and/or shading that corresponds to particularlocations of the wafer are associated with the non-conforming region.

Example 31

A non-transitory computer-readable storage medium of Example 25, whereinfunctionality of the microelectronic devices includes one of thefollowing:

-   -   physical properties, arrangement/orientation relative to its        neighboring devices (e.g., within same layer, layers below, and        layers above), and physical functionality;    -   electrical properties, electrical interactions relative to its        neighboring devices (e.g., within same layer, layers below, and        layers above), and electrical functionality;    -   electrical-magnetic properties, electrical-magnetic interactions        relative to its neighboring devices (e.g., within same layer,        layers below, and layers above), and electrical-magnetic        functionality;    -   electrical-mechanical interactions relative to its neighboring        devices (e.g., within same layer, layers below, and layers        above), and electrical-mechanical functionality; or    -   a combination thereof.

Example 32

A non-transitory computer-readable storage medium of Example 25, whereinthe determination operation includes estimating theelectrical-mechanical properties and/or functionality of an actualpattern of one layer with the non-conforming region of the semiconductorwafer.

Example 33

A non-transitory computer-readable storage medium of Example 25, whereinthe determination operation includes modeling electrical-mechanicalproperties and/or functionality of the microelectronic devices formed byat least one layer with the non-conforming region of the semiconductorwafer.

Example 34

A non-transitory computer-readable storage medium of Example 25 furthercomprising an operation of ameliorating of the non-conformities in thenon-conforming regions changing the forming of a collection ofmicroelectronic devices from layers of a semiconductor wafer.

Example 35

A non-transitory computer-readable storage medium of Example 25 furthercomprising an operation of ameliorating the non-conformities in thenon-conforming regions that are determined to have a sufficient systemicimpact on the electrical-mechanical functionality of the microelectronicdevice being formed as part of the semiconductor wafer.

Example 36

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes:

-   -   choosing at least one semiconductor fabrication tool;    -   selecting at least one change in the operation of the chosen        semiconductor fabrication tool, where the at least one change        alters the semiconductor fabrication;    -   simulating a fabrication of a semiconductor wafer in accordance        with the selected change in the operation of the chosen        semiconductor fabrication tool;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 37

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes:

-   -   choosing a combination of multiple semiconductor fabrication        tools;    -   selecting at least one change in the operation of each of the        chosen semiconductor fabrication tools, wherein the changes        alter the semiconductor fabrication;    -   simulating a fabrication of a semiconductor wafer in accordance        with the selected change in the operation of each of the chosen        semiconductor fabrication tools;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 38

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes at least one change in the operationof at least one semiconductor fabrication tool, wherein the at least onechange alters the semiconductor fabrication.

Example 39

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes at least one change in the operationof each of the chosen semiconductor fabrication tools, wherein thechanges alter the semiconductor fabrication.

Example 40

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   altering the selected pattern.

Example 41

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   obtaining an altered pattern, wherein the altered pattern is an        alteration of the selected pattern.

Example 42

A non-transitory computer-readable storage medium of Example 35, whereinthe amelioration operation includes:

-   -   selecting a pattern of a layer that includes some portion of a        microelectronic device formed, at least in part, by the        non-conforming region;    -   altering the selected pattern;    -   simulating a fabrication of a semiconductor wafer with the        altered pattern replacing the selected pattern;    -   estimating the effect of the electrical-mechanical properties        and/or functionality of the microelectronic devices formed by        the simulated semiconductor wafer.

Example 43

A non-transitory computer-readable storage medium of Examples 25 through42, wherein the tool or tools of semiconductor fabrication is selectedfrom a group consisting of a deposition tool, a track tool, aphotolithography tool, an etch tool, and a cleaning tool.

Example 44

A semiconductor fabrication tool configured to change its operation inresponse the operations of Examples 25 through 42.

Example 45

A semiconductor wafer fabricated, at least in part, in cooperation withthe operations of Examples 25 through 42.

Example 46

A microelectronic device formed by semiconductor fabrication performed,at least in part, in cooperation with the operations of Examples 25through 42.

What is claimed is:
 1. A method that facilitates yield of functionalmicroelectronic devices in coordination with semiconductor fabrication,wherein semiconductor fabrication includes forming a collection ofmicroelectronic devices from layers of a semiconductor wafer, the methodcomprising: gathering fabrication metrology data of the semiconductorwafer, wherein the fabrication metrology data includes measurements ofone or more characteristics of the wafer formed in the semiconductorfabrication and each measurement being associated with a spatiallocation of the wafer from where such measurement is made; detectingnon-conformities of the semiconductor wafer based on the gatheredfabrication metrology data; identifying a non-conforming region of thesemiconductor wafer, wherein the non-conforming region includes anaggregation of neighboring non-conformities; determining the systemicimpact on the non-conformities in the non-conforming regions on thefunctionality of the microelectronic devices formed at least in part bythe non-conforming region; ameliorating the non-conformities in thenon-conforming regions that are determined to have a systemic impact onthe electrical-mechanical functionality of the microelectronic devicebeing formed as part of the semiconductor wafer.
 2. The method of claim1, wherein the amelioration includes: choosing at least onesemiconductor fabrication tool; selecting at least one change in theoperation of the chosen semiconductor fabrication tool, where the atleast one change alters the semiconductor fabrication; simulating afabrication of a semiconductor wafer in accordance with the selectedchange in the operation of the chosen semiconductor fabrication tool;estimating the effect of the electrical-mechanical properties and/orfunctionality of the microelectronic devices formed by the simulatedsemiconductor wafer.
 3. The method of claim 1, wherein the ameliorationincludes: choosing a combination of multiple semiconductor fabricationtools; selecting at least one change in the operation of each of thechosen semiconductor fabrication tools, wherein the changes alter thesemiconductor fabrication; simulating a fabrication of a semiconductorwafer in accordance with the selected change in the operation of each ofthe chosen semiconductor fabrication tools; estimating the effect of theelectrical-mechanical properties and/or functionality of themicroelectronic devices formed by the simulated semiconductor wafer. 4.The method of claim 1, wherein the amelioration includes at least onechange in the operation of at least one semiconductor fabrication tool,wherein the at least one change alters the semiconductor fabrication. 5.The method of claim 1, wherein the amelioration includes at least onechange in the operation of at least one of the chosen semiconductorfabrication tools, wherein the changes alter the semiconductorfabrication.
 6. The method of claim 1, wherein the tool or tools ofsemiconductor fabrication is selected from a group comprising adeposition tool, a track tool, a photolithography tool, an etch tool,and a cleaning tool.
 7. A non-transitory computer-readable storagemedium comprising instructions that when executed cause a processor of acomputing device to perform operations in coordination withsemiconductor fabrication by forming a collection of microelectronicdevices from layers (e.g., a stack of patterns of materials) of asemiconductor wafer, the operations comprising: gathering fabricationmetrology data of the semiconductor wafer, wherein the fabricationmetrology data includes measurements of one or more characteristics ofthe wafer formed in the semiconductor fabrication and each measurementbeing associated with a spatial location of the wafer from where suchmeasurement is made; detecting non-conformities of the semiconductorwafer based on the gathered fabrication metrology data; identifying anon-conforming region of the semiconductor wafer, wherein thenon-conforming region includes an aggregation of neighboringnon-conformities; determining the systemic impact on thenon-conformities in the non-conforming regions on the functionality ofthe microelectronic devices formed at least in part by thenon-conforming region; ameliorating the non-conformities in thenon-conforming regions that are determined to have a sufficient systemicimpact on the electrical-mechanical functionality of the microelectronicdevice being formed as part of the semiconductor wafer.
 8. Thenon-transitory computer-readable storage medium of claim 7, wherein theamelioration operation includes: choosing at least one semiconductorfabrication tool; selecting at least one change in the operation of thechosen semiconductor fabrication tool, where the at least one changealters the semiconductor fabrication; simulating a fabrication of asemiconductor wafer in accordance with the selected change in theoperation of the chosen semiconductor fabrication tool; estimating theeffect of the electrical-mechanical properties and/or functionality ofthe microelectronic devices formed by the simulated semiconductor wafer.9. The non-transitory computer-readable storage medium of claim 7,wherein the amelioration operation includes: choosing a combination ofmultiple semiconductor fabrication tools; selecting at least one changein the operation of at least one of the chosen semiconductor fabricationtools, wherein the changes alter the semiconductor fabrication;simulating a fabrication of a semiconductor wafer in accordance with theselected change in the operation of each of the chosen semiconductorfabrication tools; estimating the effect of the electrical-mechanicalproperties and/or functionality of the microelectronic devices formed bythe simulated semiconductor wafer.
 10. The non-transitorycomputer-readable storage medium of claim 7, wherein the ameliorationoperation includes at least one change in the operation of at least onesemiconductor fabrication tool, wherein the at least one change altersthe semiconductor fabrication.
 11. The non-transitory computer-readablestorage medium of claim 7, wherein the amelioration operation includesat least one change in the operation of each of the chosen semiconductorfabrication tools, wherein the changes alter the semiconductorfabrication.
 12. The non-transitory computer-readable storage medium ofclaim 7, wherein the amelioration operation includes at least one changein the operation of each of the chosen semiconductor fabrication tools,wherein the changes alter the semiconductor fabrication.
 13. Thenon-transitory computer-readable storage medium of claim 7, wherein thetool or tools of semiconductor fabrication is selected from a groupconsisting of a deposition tool, a track tool, a photolithography tool,an etch tool, and a cleaning tool.
 14. A method that facilitates yieldof functional microelectronic devices in coordination with semiconductorfabrication, wherein semiconductor fabrication includes forming acollection of microelectronic devices from layers of a semiconductorwafer, the method comprising: gathering fabrication metrology data ofthe semiconductor wafer, wherein the fabrication metrology data includesmeasurements of one or more characteristics of the wafer formed in thesemiconductor fabrication and each measurement being associated with aspatial location of the wafer from where such measurement is made;detecting non-conformities of the semiconductor wafer based on thegathered fabrication metrology data; identifying a non-conforming regionof the semiconductor wafer, wherein the non-conforming region includesan aggregation of neighboring non-conformities; determining the systemicimpact on the non-conformities in the non-conforming regions on thefunctionality of the microelectronic devices formed at least in part bythe non-conforming region.
 15. The method of claim 14, wherein thegathering of fabrication metrology data includes: measurements frommultiple semiconductor wafers using a common stack of patterns ofmaterials as the layers of the semiconductors being fabricated;measuring and/or calculating fabrication metrology data selected from agroup consisting of edge placement error (EPE), grid critical dimension(CD) measurements, block line width roughness (LWR) measurements, gridLWR measurements, block CD measurements, profile (i.e., cross-section),selective deposition; electrical properties of the formedmicroelectronic devices; contact hole CD; contact hole roughness (CERand ellipticity; short trenches tip-to-tip distance; line tip-to-tipdistance; layer-to-layer displacement data (i.e., overlay data); filmthicknesses and uniformities; measurements that occur after actions of asingle tool; measurements that occur after all of the tools of a singlelayer; measurements that occur after multiple layers; and a combinationthereof.
 16. The method of claim 14, wherein a non-conformity is an areaof an active layer with characteristics that are capable of beingmeasured and/or where such measurements fall outside a defined rangeand/or threshold.
 17. The method of claim 14, wherein functionality ofthe microelectronic devices includes one of the following: physicalproperties, arrangement/orientation relative to its neighboring devices,and physical functionality; electrical properties, electricalinteractions relative to its neighboring devices, and electricalfunctionality; electrical-magnetic properties, electrical-magneticinteractions relative to its neighboring devices, andelectrical-magnetic functionality; electrical-mechanical interactionsrelative to its neighboring devices, and electrical-mechanicalfunctionality; or a combination thereof.
 18. The method of claim 14,wherein the determination of the systemic impact includes estimating theelectrical-mechanical properties and/or functionality of an actualpattern of one layer with the non-conforming region of the semiconductorwafer.
 19. The method of claim 14, wherein the determination of thesystemic impact includes modeling electrical-mechanical propertiesand/or functionality of the microelectronic devices formed by at leastone layer with the non-conforming region of the semiconductor wafer. 20.The method of claim 14, wherein the tool or tools of semiconductorfabrication is selected from a group consisting of a deposition tool, atrack tool, a photolithography tool, an etch tool, and a cleaning tool.